✦ LIBER ✦
Observation of Si cluster formation in SiO[sub 2] films through annealing process using x-ray photoelectron spectroscopy and infrared techniques
✍ Scribed by Furukawa, Katsuhiko; Liu, Yichun; Nakashima, Hiroshi; Gao, Dawei; Uchino, Kiichiro; Muraoka, Katsunori; Tsuzuki, Hirohisa
- Book ID
- 126300402
- Publisher
- American Institute of Physics
- Year
- 1998
- Tongue
- English
- Weight
- 250 KB
- Volume
- 72
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.120865
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