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Pattern Etching of CVD Si[sub 3]N[sub 4]∕SiO[sub 2] Composites in HF∕Glycerol Mixtures

✍ Scribed by Deckert, Cheryl A.

Book ID: 121438551
Publisher: The Electrochemical Society
Year: 1980
Tongue: English
Weight: 958 KB
Volume: 127
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2129489

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