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Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range

✍ Scribed by M. Procop; M. Radtke; M. Krumrey; K. Hasche; S. Schädlich; W. Frank

Publisher
Springer
Year
2002
Tongue
English
Weight
516 KB
Volume
374
Category
Article
ISSN
1618-2650

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📜 SIMILAR VOLUMES

Application of Monte Carlo method to the
Application of Monte Carlo method to the electron probe microanalysis of thin films
✍ A. Desalvo; R. Rosa 📂 Article 📅 1979 🏛 Elsevier Science ⚖ 410 KB

In the present paper the basic features of Monte Carlo method as applied to the electron probe microanalysis are outlined. In particular, applications to a large variety of experimental situations are reviewed. The problems examined are as follow: i) a binary film on a substrate of a third element;