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Accuracy of film thickness determination in electron probe microanalysis

✍ Scribed by M�ller, Andreas ;Weinbruch, Stephan ;Stadermann, Frank J. ;Ortner, Hugo M. ;Neubeck, Klaus ;Balogh, Adam G. ;Hahn, Horst

Publisher: Springer-Verlag
Year: 1995
Weight: 390 KB
Volume: 119
Category: Article
ISSN: 0344-838X
DOI: 10.1007/bf01244852

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