Density, thickness and composition measurements of TiO2SiO2 thin films by coupling X-ray reflectometry, ellipsometry and electron probe microanalysis-X

✍ Scribed by A. Hodroj; H. Roussel; A. Crisci; F. Robaut; U. Gottlieb; J.L. Deschanvres

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 536 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.06.014