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Electrical Modeling and Characterization of Through Silicon via for Three-Dimensional ICs

โœ Scribed by Katti, G.; Stucchi, M.; De Meyer, K.; Dehaene, W.


Book ID
114619847
Publisher
IEEE
Year
2010
Tongue
English
Weight
554 KB
Volume
57
Category
Article
ISSN
0018-9383

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โœ Teng Wang; Kejll Jeppson; Lilei Ye; Johan Liu ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 520 KB

Interconnection of carbon-nanotube (CNT)-filled through-silicon vias is demonstrated through an easy-to-implement process based on mechanical fastening. Direct CNT-to-CNT and CNT-to-Au contacts are realized at the microscale, and their specific contact resistances extracted from electrical measureme