Electromagnetic modeling of massively co
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Boping Wu; Xiaoxiong Gu; Leung Tsang; Mark B. Ritter
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Article
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2011
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John Wiley and Sons
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English
β 254 KB
## Abstract This article presents a fullβwave electromagnetic approach for analyzing the electrical performance of massively coupled through silicon vias (TSV). The TSVs are modeled with SiO~2~ insulation coating and are placed in the sandwiched SiO~2~βSiβSiO~2~ substrate. The planar guided wave is