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Electrical modeling and characterization of through-silicon vias (TSVs) for 3-D integrated circuits

✍ Scribed by Ioannis Savidis; Syed M. Alam; Ankur Jain; Scott Pozder; Robert E. Jones; Ritwik Chatterjee


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
541 KB
Volume
41
Category
Article
ISSN
0026-2692

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## Abstract This article presents a full‐wave electromagnetic approach for analyzing the electrical performance of massively coupled through silicon vias (TSV). The TSVs are modeled with SiO~2~ insulation coating and are placed in the sandwiched SiO~2~‐Si‐SiO~2~ substrate. The planar guided wave is