Electrical activation and electron spin coherence of ultralow dose antimony implants in silicon

✍ Scribed by Schenkel, T.; Liddle, J. A.; Persaud, A.; Tyryshkin, A. M.; Lyon, S. A.; de Sousa, R.; Whaley, K. B.; Bokor, J.; Shangkuan, J.; Chakarov, I.

• Book ID: 120909388
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 408 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2182068