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Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

โœ Scribed by L. Ottaviano; M. Italia; G. Mannino; V. Privitera; M. Herden; T. Feudel

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
90 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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