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Electrical characteristics of silicon nitride on silicon and InGaAs as a function of the insulator stoichiometry

✍ Scribed by P.E. Bagnoli; A. Piccirillo; A.L. Gobbi; R. Giannetti


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
465 KB
Volume
52
Category
Article
ISSN
0169-4332

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