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On the chemical and mechanical properties of sputtered silicon nitride films

✍ Scribed by F. Jansen; A. Day; L. Wamboldt

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 653 KB
Volume: 219
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90734-s

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