✦ LIBER ✦

Preparation and characterization of reactively sputtered silicon nitride thin films

✍ Scribed by S.K. Ghosh; T.K. Hatwar

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 505 KB
Volume: 166
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90398-7

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical properties of reactively sputter

Optical properties of reactively sputtered silicon nitride films

✍ E Paule; E Elizalde; JM Martínez-Duart; JM Albella 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 233 KB

Structural studies of reactively sputter

Structural studies of reactively sputtered carbon nitride thin films

✍ Sunil Kumar; T.L. Tansley 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 369 KB

Silicon nitride films prepared by reacti

Silicon nitride films prepared by reactive plasma sputtering

✍ J. Buch; J. Červenák 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 304 KB

Silicon nitride and oxynitride films pre

Silicon nitride and oxynitride films prepared by ion beam reactive sputtering

✍ V.A. Burdovitsin 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Nitrogen profiles of thin sputtered PVD

Nitrogen profiles of thin sputtered PVD silicon nitride films

✍ A Markwitz; H Baumann; EF Krimmel; M Rose; K Bethge; P Misaelides; S Logothetidi 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 322 KB

XPS, XANES and ToF-SIMS Characterization

XPS, XANES and ToF-SIMS Characterization of Reactively Magnetron-sputtered Carbon Nitride Films

✍ Lopez, S.; Dunlop, H. M.; Benmalek, M.; Tourillon, G.; Wong, M.-S.; Sproul, W. D 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 443 KB 👁 2 views

The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride Ðlms were deposited by various reactive magnetron sputtering pro