Influence on the electrical characteristics of the -NH radicals incorporated into PECVD silicon nitride films

✍ Scribed by O Sanchez; C Gomez-Aleixandre; M Fernandez; JM Albella

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 291 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90025-0