✦ LIBER ✦
Influence on the electrical characteristics of the—NH radicals incorporated into PECVD silicon nitride films : O. Sanchez, C. Gomez-Aleixandre, M. Fernandez and J. M. Albella. Vacuum39(7/8), 727 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 129 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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