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Silicon nitride/semiconductor interface state density as a function of the insulator stoichiometry

✍ Scribed by P.E. Bagnoli; A. Piccirillo; P. Valenti; G. Civale; A.L. Gobbi


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
438 KB
Volume
56-58
Category
Article
ISSN
0169-4332

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