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Comparison of solubility limits and electrical activities for antimony and arsenic ion implanted silicon

✍ Scribed by T. Graziani; K.T. Short; J.S. Williams

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 247 KB
Volume: 91
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(82)90478-9

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