✦ LIBER ✦
CW laser annealing of boron and arsenic-implanted silicon; electrical properties, crystalline structure and limitations: A. Gat, T. J. Magee, J. Peng, V. R. Deline and C. A. Evans, Jr.Solid-St. Technol. p. 59 (November 1979)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 72 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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