✦ LIBER ✦
5354. The effect of thermal annealing on the grain size and electrical characteristics of arsenic ion-implanted and laser-irradiated polycrystaliine silicon films: Kenji Shihata and Shinji Onga, J Appl Phys 52 (9), 1981, 5566–5574
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 151 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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