✦ LIBER ✦

Electrical activation process of erbium implanted in silicon and SIMOX

✍ Scribed by Y.S. Tang; B.J. Sealy

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The electrical activation of implanted a

✍ H. Ryssel; H. Kranz 📂 Article 📅 1975 🏛 Springer 🌐 English ⚖ 265 KB

Donor activity of ion-implanted erbium i

✍ L. Palmetshofer; Yu. Suprun-Belevich; M. Stepikhova 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 435 KB

Phosphorus electrical activation in high

✍ Wu Yuguang; Zhang Tonghe; Luo Yan 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 99 KB

Electrically active defects in erbium-im

✍ V.V. Emtsev; V.V. Emtsev Jr.; V.V. Kozlovskii; A. Misiuk; G.A. Oganesyan; D.S. P 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 136 KB

Dose-rate dependent electrical activatio

✍ F.G. Moore; H.B. Dietrich 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 380 KB

Electrical activation and defects in sil

✍ L. Palmetshofer; J. Kastner; K. Lübke 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 446 KB