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Donor activity of ion-implanted erbium in silicon

✍ Scribed by L. Palmetshofer; Yu. Suprun-Belevich; M. Stepikhova

Book ID: 114168842
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 435 KB
Volume: 127-128
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00974-3

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