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Rutherford backscattering and secondary ion mass spectrometry studies of erbium implanted silicon

✍ Scribed by W.P. Gillin; Zhang Jingping; B.J. Sealy

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 259 KB
Volume: 77
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(91)90344-u

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