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Oxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium

✍ Scribed by V. V. Emtsev; V. V. Emtsev; D. S. Poloskin; E. I. Shek; N. A. Sobolev; J. Michel; L. C. Kimerling


Book ID
110120225
Publisher
Springer
Year
1999
Tongue
English
Weight
66 KB
Volume
33
Category
Article
ISSN
1063-7826

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