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Effects of the Substrate Crystals upon the Structure of Thermal Oxide Layers on Si

✍ Scribed by T. Shimura; Mr. H. Sensui; M. Umeno

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 136 KB
Volume: 33
Category: Article
ISSN: 0232-1300
DOI: 10.1002/(sici)1521-4079(1998)33:4<637::aid-crat637>3.0.co;2-m

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