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The effect of oxidation temperature on the nano crystalline structure of ZrO2 films deposited on silicon and glass substrates

✍ Scribed by M. M. Larijani; D. Najafi; M. Eshghabadi

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 158 KB
Volume: 46
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.201100171

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