Effects of dry etching on the electrical properties of silicon: J M Heddleson et al, J Vac Sci Technol, B6, 1988, 280–283

• Book ID: 103473377
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 155 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90960-3