✦ LIBER ✦
In situ investigation of TiN formation on top of TiSi2: M F C Willemsen et al,J Vac Sci Technol,B6, 1988, 53–61
- Book ID
- 103470963
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 155 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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