𝔖 Bobbio Scriptorium

✦ LIBER ✦

Spectroscopic studies of fluorescent emission in plasma etching of silicon nitride: D Field et al, J Vac Sci Technol, B6, 1988, 551–558

Book ID: 103473378
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 155 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90961-5

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