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Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition

✍ Scribed by Do-Geun Kim; Tae-Yeon Seong; Young-Joon Baik

Book ID: 108422983
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 696 KB
Volume: 153
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(01)01543-2

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