Nano-indentation study on the mechanical properties of TiC/Mo multilayers deposited by ion beam assisted deposition
โ Scribed by Jing Wang; Wen-Zhi Li; Heng-De Li; Bing Shi; Jian-Bin Luo
- Book ID
- 108422710
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 180 KB
- Volume
- 128-129
- Category
- Article
- ISSN
- 0257-8972
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๐ SIMILAR VOLUMES
The effects of nitrogen-beam voltage on the structure, stress, energy band gap and hardness of AIN thin films deposited on Si (1 1 1), Si (1 00) and sapphire (0001) by ion beam assisted deposition (IBAD) are reported. As the nitrogen-beam voltage was increased from 50 to 200 V, the stress and disord
## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1โ0.3โnm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite