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Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)

✍ Scribed by Li-Jian Meng; Jinsong Gao; R.A. Silva; Shigeng Song

Book ID
108289854
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
719 KB
Volume
516
Category
Article
ISSN
0040-6090

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πŸ“œ SIMILAR VOLUMES

Effect of the deposition rate on ITO thi
Effect of the deposition rate on ITO thin film properties prepared by ion beam assisted deposition (IBAD) technique
✍ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite