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Effect of assisted ion energy on properties of silicon oxide thin film deposited by dual ion-beam sputtering

✍ Scribed by Jin-Wook Seong; Daiwon Choi

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 697 KB
Volume: 105
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.26338

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