✦ LIBER ✦
Effect of Ion Beam Mixing and Compound Formation on Sputter Depth Profile of a Ta/Si Multilayer Thin Film
✍ Scribed by Stepanova, M. G.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 323 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0142-2421
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