## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite
✦ LIBER ✦
Tribological properties of DLC film prepared by C+ion beam-assisted deposition (IBAD)
✍ Scribed by Bai Xiuqin; Peter Böhm; Li Jian; Yan Xinping
- Publisher
- Wuhan University of Technology
- Year
- 2006
- Tongue
- English
- Weight
- 605 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1000-2413
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