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Effect of ion energy on the mechanical properties of ion beam assisted deposition (IBAD) wear resistant coatings

✍ Scribed by Catherine M. Cotell; James K. Hirvonen

Book ID
107930471
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
1023 KB
Volume
81
Category
Article
ISSN
0257-8972

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Effect of the deposition rate on ITO thi
Effect of the deposition rate on ITO thin film properties prepared by ion beam assisted deposition (IBAD) technique
✍ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite