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Bactericidal and biocompatible properties of TiN/Ag multilayered films by ion beam assisted deposition

โœ Scribed by J. Zhao; X. M. Cai; H. Q. Tang; T. Liu; H. Q. Gu; R. Z. Cui

Book ID
106399909
Publisher
Springer
Year
2008
Tongue
English
Weight
331 KB
Volume
20
Category
Article
ISSN
0957-4530

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Indium tin oxide thin films prepared by
Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents
โœ Meng, Lijian ;Gao, Jinsong ;Teixeira, V. ;dos Santos, M. P. ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 664 KB

## Abstract Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80โ€“120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion