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Fundamentals of ion-beam-assisted deposition: Technique and film properties

✍ Scribed by G.K Hubler

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 945 KB
Volume: 115
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(89)90677-1

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