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Structure and optical properties of TiN films prepared by dc sputtering and by ion beam assisted deposition

โœ Scribed by M Bonelli; LA Guzman; A Miotello; L Calliari; M Elena; PM Ossi


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
516 KB
Volume
43
Category
Article
ISSN
0042-207X

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