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A comparison of TiN films produced by reactive d.c. sputtering and ion-assisted deposition

โœ Scribed by A.V. Bieli; H. Kheyrandish; J.S. Colligon


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
635 KB
Volume
200
Category
Article
ISSN
0040-6090

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