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Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering

✍ Scribed by S. Schiller; G. Beister; W. Sieber; G. Schirmer; E. Hacker


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
397 KB
Volume
83
Category
Article
ISSN
0040-6090

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