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Features of and IN SITU measurements on absorbing TiOx films produced by reactive d.c. magnetron-plasmatron sputtering

โœ Scribed by S. Schiller; G. Beister; S. Scheneider; W. Sieber


Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
473 KB
Volume
72
Category
Article
ISSN
0040-6090

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