✦ LIBER ✦

Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films

✍ Scribed by J.M. Poitevin; G. Lemperiere; J. Tardy

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of substrate bias on compositi

✍ J.-E. Sundgren; B.-O. Johansson; S.-E. Karlsson 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 539 KB

The effects of substrate bias on the str

✍ Yasuhiro Igasaki; Hiroji Mitsuhashi 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 870 KB

The influence of substrate temperature a

✍ Shozaburo Nishikawa 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 528 KB

Effect of substrate temperature on the p

✍ B. Subramanian; R. Ananthakumar; M. Jayachandran 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 530 KB

The influence of target oxidation and gr

✍ M. Buchanan; J.B. Webb; D.F. Williams 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 565 KB

Mechanisms of reactive sputtering of tit

✍ J.-E. Sundgren; B.-O. Johansson; H.T.G. Hentzell; S.-E. Karlsson 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 968 KB