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Effect of substrate temperature on the properties of reactively sputtered TiN/NbN multilayers

โœ Scribed by B. Subramanian; R. Ananthakumar; M. Jayachandran


Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
530 KB
Volume
46
Category
Article
ISSN
0232-1300

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