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Effects of thermal annealing on the properties of zirconia films prepared by ion-assisted deposition

โœ Scribed by M. Ghanashyam Krishna; S. Kanakaraju; K. Narasimha Rao; S. Mohan

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
391 KB
Volume
21
Category
Article
ISSN
0921-5107

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โœ Shih-Liang Ku; Cheng-Chung Lee ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 484 KB

Silicon nitride (SiN x ) films were prepared by ion-assisted deposition process. The films were analyzed by measurement of scanning electron microscopy (SEM), Fourier transform infrared spectrometry (FTIR), Xray photoelectron spectrometry, spectrophotometer, and ellipsometer measurements. The effect