Optical and electrical properties of Y2O
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Jian Leng; Zhinong Yu; Yuqiong Li; Dongpu Zhang; Xiaoyi Liao; Wei Xue
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Article
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2010
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Elsevier Science
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English
β 459 KB
Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had le