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Preparation of TiO2 and Al2O3 thin films by ion-beam induced chemical vapour deposition

✍ Scribed by D Leinen; A Fernández; JP Espinós; AR González-Elipe


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
821 KB
Volume
45
Category
Article
ISSN
0042-207X

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