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Development of pure O2 cluster ion beam assisted deposition system

โœ Scribed by T. Nose; S. Inoue; N. Toyoda; K. Mochiji; T. Mitamura; I. Yamada

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
173 KB
Volume
241
Category
Article
ISSN
0168-583X

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