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Surface characterization and properties of silicon nitride films prepared by ion-assisted deposition

✍ Scribed by Shih-Liang Ku; Cheng-Chung Lee

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 304 KB
Volume: 204
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2010.03.022

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