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Characterization of niobium nitride thin films prepared by ion-assisted deposition

✍ Scribed by A. Cavalleri; F. Giacomozzi; L. Guzman; F. Marchetti; P.M. Ossi


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
483 KB
Volume
201
Category
Article
ISSN
0040-6090

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