Single-crystal niobium nitride thin films prepared with radical beam assisted deposition

✍ Scribed by N. Hayashi; I.H. Murzin; I. Sakamoto; M. Ohkubo

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 377 KB
• Volume: 259
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)06436-9