✦ LIBER ✦

Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition

✍ Scribed by Liu Xianghuai; Yu Yuehui; Zheng Zhihong; Huang Wei; Zou Shichang; Jin Zuqing; Chang Ming; Xu Shoulian; S. Taniguchi; T. Shibata; K. Nakamura

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 410 KB
Volume: 46
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(91)90165-s

No coin nor oath required. For personal study only.

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